Abstract:
This work concern hydrocarbon gas sensor principle by transferring a novel zeolite-based on impedimetric, which has been originally manufactured by comprising only thick-film processes and one electroplating step. The sensing effect is based on a thin chromium oxide layer between the inter digital electrodes and a Pt-loaded ZSM-5 zeolite film. When hydrocarbons are present in the sensor ambient, the electrical sensor impedance increases strongly and selectively. The chromium oxide film is electroplated on Au screen-printed inter digital electrodes and then oxidized to Cr2O3. The electrode area is covered with the screen-printed zeolite. The sensor device is self-heated utilizing a planar platinum heater on the backside.

Keywords: chromium oxide layer, ZSM-5 zeolite film, Cr2O3, digital electrodes, screen-printed, planar platinum heater.