Abstract:
An overview of the MEMS technology development and the applications is given in this paper . A special attention is paid to the RF MEMS switches .Both in series and shunt MEMS switches have been considered. It also presented a technique for modelling and design of cantilever based MEMS switch that could be used for performance in the Ku band frequency. Two designs have been developed that used more than one output. Variation in the cantilever beam design has been used to design a dual and quad output switch. The designed structure is simulated using IntellSuite and HFSS software tools. An insertion loss of 0.8db and isolation of range 47 db for dual output and an insertion loss of around 2.2db and isolation loss in the range of 57 db for quad output structure has been observed in the Ku band frequency(12-18GHz).

Keywords: High Frequency Simulator (HFSS),IntelliSuite ,MEMS,RF switch matrix, satellite payload, simulation.